Tungsten niobium target sand blasting process

Tungsten and niobium target material has the characteristics of high strength, high hardness, wear resistance, corrosion resistance and good heat resistance, so it is widely used in high pressure, high speed, high temperature, corrosive medium and other working environment. However, in the process of sputtering, the edge of the target will have particles produced by sputtering, and these particles once peeled off, not only will affect the sputtering environment, but also reduce the quality of the product. In order to solve this problem, the existing technology modified some non-sputtering areas of the target material, that is, the surface of the sandblasted part is rough, which is easier to absorb particles, so as to reduce the probability of spalling.

The specific process of sand blasting treatment of tungsten and niobium target material:

(1) Preparation of target materials
Tungsten powder and niobium powder are used as raw materials, and then loaded into the mixer for mixing, and then the mixed powder is loaded into the tubular rubber mold sleeve, and then the target body is pressed and formed by cold isostatic press. The target body is sintered, cooled, roughing, fine grinding and other processes, and the required target can be obtained.

(2) Modification
The alloy cathode target was loaded in the coating chamber of the physical vapor deposition equipment, and the cubic boron nitride micropowder was put into the roller deposition platform. Close the door of the coating chamber, set the vapor deposition parameters, and carry out the physical vapor deposition coating; The coated cubic boron nitride powders were treated in a vacuum heat treatment furnace to obtain the surface metallized tungsten and niobium targets.